Effect of Annealing Temperature on Optical Properties, Microstructure, and Dielectric Impedance of Barium Zirconate Titanate (BT-BZT) for Multilayer Ceramic Capacitor (MLCC) Application Rahmi Dewi(a*), Lulu Hayati (a) Zulfa Nasir (a), Amelia Linggawati (b), Ari Sulistyo Rini (a), Yanuar Hamzah (a), Tengku Emrinaldi (a), Zuhdi (c)
(a)Department of Physics, Faculty of Mathematics and Natural Sciences, University of Riau, Pekanbaru, Indonesia
*rahmi.dewi[at]lecturer.unri.ac.id
(b)Department of Chemistry, Faculty of Mathematics and Natural Sciences, University of Riau, Pekanbaru, Indonesia.
(c)Department of Physics, Faculty of Teacher Training and Education, Universitas Riau, Pekanbaru, Indonesia
Abstract
Barium zirconate titanate has piezoelectric and ferroelectric properties, making it an important composition in multilayer ceramic capacitors (MLCC). Barium zirconate titanate thin films with the composition of (0.8)BaTiO3(0.2)BaZr0.5Ti0.5O3 were annealed at 700oC and 750oC. The samples were prepared using the Sol-Gel method and then characterized using Ultraviolet-Visible (UV-Vis), Xray Diffraction (XRD), Field Emission Scanning Electron Microscopy (FESEM), and Impedance Spectroscopy. The characterization results using UV-Vis for the 700oC and 750oC samples showed that the energy band gap values were 3.25 eV and 3.24 eV, respectively. The average grain size is 234.73, and 242.16 at 700oC and 750oC. Impedance spectroscopy characterization at a frequency of 100 Hz to 1 MHz obtained the highest dielectric constant of 3557 and 3542 with the highest capacitance values of 88.313 F and 80.881 F at 700oC and 750oC. Increasing the annealing temperature will produce larger capacitance and dielectric constant values so that the BT-BZT sample is can be good for application as a multilayer ceramic capacitor (MLCC).
Keywords: BT-BZT thin film-energy band gap-grain size- dielectric constant- capacitance