Investigation of resonance frequencies in undamped nonlinear microbeam with multi-frequency electrostatic excitations Mohammad Mahfuzh Shiddiq, Johan Matheus Tuwankotta, Eric
Mathematics Department, Institut Teknologi Bandung
Abstract
Microelectromechanical systems (MEMS) are intensively and massively studied due to several advantages such as low cost and low energy consumption. In particular, the study of MEMS widely conducted using microbeams structures in many applications such as sensors, micro-conductors, switches and motors, etc. This study aims to investigate the microbeams vibration with simply supported boundary conditions subjected to multifrequency electrostatic excitations- taking into account mid-plane stretching forces but damping forces are omitted. This study applies perturbation method with multiple time scale to investigate resonance frequencies considering the influence of several parameters given in the model. The perturbation method does not involve truncating the constructed series solution, unlike the previous research that commonly performed truncation without justification. The excitation frequencies are explicitly determined without experimental research that costly and time-consuming.
